KLA lists 10 executives, led by Richard P. Wallace, President, CEO & Executive Director (age 65). Bren D. Higgins is the company's Executive VP & CFO (age 55).
In fiscal year 2026 the highest-paid executive was Richard P. Wallace, President, CEO & Executive Director, with total pay of $6.48 million. The 7 executives with reported pay received $16.75 million in all.
The average age of the executives with a known age is 57; the youngest is 51 and the oldest 66.
Titles, ages and pay from company filings; pay for fiscal year 2026.

President, CEO & Executive Director
Executive VP & CFO
Executive VP, Chief Legal Officer & Corporate Secretary
President of Semiconductor Products & Customers
Executive Vice President of KLA Global Services
Senior VP & Chief Accounting Officer
CTO & Executive VP of Corporate Alliances
Vice President of Investor Relations
Senior VP & Chief Communications Officer
Executive VP & Chief Human Resources Officer
| Executive | Title | Age | Total pay |
|---|---|---|---|
| Richard P. Wallace | President, CEO & Executive Director | 65 | $6.48 million |
| Bren D. Higgins | Executive VP & CFO | 55 | $2.83 million |
| Ahmad A. Khan | President of Semiconductor Products & Customers | 51 | $2.82 million |
| Brian W. Lorig | Executive Vice President of KLA Global Services | 51 | $1.79 million |
| Mary Beth Wilkinson | Executive VP, Chief Legal Officer & Corporate Secretary | 52 | $1.37 million |
| Ben Bin-Ming Tsai | CTO & Executive VP of Corporate Alliances | 66 | $998,019 |
| Virendra A. Kirloskar | Senior VP & Chief Accounting Officer | 62 | $455,182 |
Total pay as reported for the fiscal year; it can include salary, bonus and stock awards.
Richard P. Wallace (President, CEO & Executive Director), age 65; total pay in fiscal year 2026 was $6.48 million.
Bren D. Higgins (Executive VP & CFO), age 55.
Richard P. Wallace, President, CEO & Executive Director, with total pay of $6.48 million in fiscal year 2026.
Richard P. Wallace (President, CEO & Executive Director), Bren D. Higgins (Executive VP & CFO), Mary Beth Wilkinson (Executive VP, Chief Legal Officer & Corporate Secretary), Ahmad A. Khan (President of Semiconductor Products & Customers) and Brian W. Lorig (Executive Vice President of KLA Global Services), and 5 more.